A Fundamental technique for measuring the properties of plasmas is the use
of electrostatic probes, most notably the Langmuir probe, Mach probe, and
retarding field analyzer (RFA). These probes are inserted into the plasma
and thus allow local measurement of several plasma properties. The Langmuir
probe measures the electron energy, temperature, and density and comes in
single, double, and triple tip configurations, which have various effects on
the plasma. Some of these configurations are able to measure the floating
potential and/or plasma potential. A Mach probe is used to measure the ion
flow velocity. Retarding field analyzers can measure the ion or electron
energy and temperature in specific directions. Each electrostatic probe
configuration has its advantages and disadvantages and the scientists at WSI
can help you decide which probe is right for you. Two excellent references
for electrostatic probes are Hutchinson's Principles of Plasma Diagnostics and Noah Hershkowitz's chapter in
Plasma Diagnostics: Discharge Parameters and Chemistry. References
for specific applications of each type of probe are provided in the sections
below.
When requesting a quote for an electrostatic diagnostic, please consider the
following:
Quantity to be measured and its expected magnitude. Electron or ion
measurements? Is electron density of interest? Ion flow velocity or
energy and temperature? Are floating and/or plasma potential of
interest?
Frequency response. What is the frequency (or range of frequencies)
that need to be measured? What is the timescale of evolution of
the measured quantitiy?
Digitizer dynamic range. What is the peak-to-peak signal amplitude
that your data acquisition system can handle?
Vacuum environment. Is the probe intended to be used in air or vacuum?
High vacuum (HV, 10-3 - 10-9 torr) or ultra-high
vacuum (UHV, 10-9 - 10-12 torr)? This helps us
determine the materials that can be used for your application.
Thermal environment. Will the probe experience high heat loads (for
example, behind first wall tiles) or low heat loads? Will it
experience thermal cycling? Will it be used at a high or low ambient
temperature (will the chamber be baked)? This information also places
restrictions on the materials that can be used.
Mounting interface. Will the probe be mounted to a vacuum flange, a
custom mounting structure on the chamber wall, a reciprocating drive,
or something else?
Size constraints. Diameter of port through which the probe must be
inserted, distance from the mount to the measurement location within
the plasma, perturbation to the plasma, et cetera.
Available in Single, Double, Triple, or Quad tip configurations. Built for UHV environments. Probe size customizable depending on plasma parameters. Reciprocating probes available. Flat probes also available.